Answer to Question #207531 in Mechanical Engineering for UUID

Question #207531

An Al-silicon dioxide-silicon MOS capacitor has an oxide thickness of 450 Å and a doping of NA 10¹5 cm³. The fixed oxide charge density is 3 x 10¹¹1 cm². Calculate (a) the flat-band voltage and (b) the threshold voltage.


1
Expert's answer
2021-06-24T11:53:02-0400

Part a

"\\phi_{FP}=-(0.0259) \\ln(\\frac{10^{15}}{15*10^{10}})"

"\\phi_{ms}=\\phi_m'-(x'+\\frac{E_s}{2e}+|\\phi_{FP}|)=3.20-(3.25+0.56+0.288)=-0.898 V"

"C_{ox}=\\frac{\\varepsilon_{ox}}{t_{ox}}=\\frac{3.9*8.8510^{-14}}{450*10^{-8}}=9.67*10^{-8}F\/cm^2"

"v_{FB}=\\phi_{ms}-\\frac{\\phi_{ss}}{C_{ox}}=-0.898-\\frac{3*10^{11}*1.6*10^{-19}}{9.67*10^{-8}}=-1.52 V"

Part b

"V_T=\\frac{|Q'_{SD}(max)|}{C_{ox}}+2|\\phi_{FP}|+V_{FB}"

"V_{dT}=[\\frac{4*11.7*8.85*10^{-14}*0.288}{1.6*10^{-19}*10^{15}}]^{0.5}=0.863 \\mu m"

"|Q'_{SD}(max)|=1.6*10^{-19}*10^{15}*0.863*10^{-4}=1.38*10^{-8}c\/cm^2"

"V_T=\\frac{1.38*10^{-8}}{7.67*10^{-8}}+2*0.288-1.52 = -0.764 V"


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Comments

Charan
09.07.21, 05:23

Thank you this is correct

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