The basic principle of Excimer laser is that the the production of the excited excimer molecules in an electrical discharge relies on complex plasma reaction processes. The Excimer lasers depend on the interaction between halogens and the noble gas to produce a highly powered beam. The source of current pumps the gas by use of high and short voltage pulses which are transmitted through metal electrodes. As a result the pulse excites the gas atoms which cases them to fuse together to form atomic pairs called dimers.
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