In this design, the intention is to have 0.1nm resolution over a lum range. Assumption is made to the effect that:
· Power supply that can generate -10V to +100V
· A 16 bit DAC board
In the presented design of piezoelectric, a double layout structure of the -axis platform fixed on the -axis platform is adopted in the stage. Each axis mainly consists of actuator, guide mechanism, and displacement feedback apparatus. The image below shows the configuration and main components of the proposed stage:
Comments
Leave a comment